The optimization of both atomic and nano-scale structure is supposed to result in nano-porous silica films with remarkable elastic properties, under volumetric deformations, combined with low mass, low thermal conductivity, and low dielectric constant. Novel experimental techniques will be used to measure the fundamental mechanical properties of thin film tensile strength and modulus, interface fracture energy and fatigue crack resistance.

To date, for this research, a set of synthesis processes has been developed under the cooperation with Prof. Tolbert’s group in Chemistry department of UCLA and a novel micro-film-tester machine has been designed and manufactured to measure the tensile modulus and strength of the films. The result shows that the nano-porous silica films possess a much higher elastic-limit than fully dense silica glass under volumetric strains. While a lower elastic-bulk-modulus was also observed which is supposed to be the result of incomplete calcinations of the silica-co-polymer combo during the chemical synthesis process.

The following slide show summarizes the process described above. Click on the arrows to see the next image.

Future work includes optimizing the chemical synthesis process, interfacial properties measurement by using the laser spallation technique, tensile properties measurement under controlled hydra-thermal and environmental conditions, as well as the potential applications in MEMS devices.